PHILADELPHIA
UNIVERSITY
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ONLINE CATALOGUE |
Dry etching for microelectronics
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Author |
Powell,Ronald A.
| Publication Data | Amesterdam: North-Holland, 1984 | Physical Description | XI, 299p | Subject Area | Graphic arts | Subject Headings | Etching Microelectronics | Call Number | 767.2 DRY |
Philadelphia University Library 2011 |